Patent details
EP3950744 Title: PHOTOSENSITIVE COMPOSITION FOR EUV LIGHT, METHOD FOR PATTERN FORMATION, AND METHOD FOR PRODUCING ELECTRONIC DEVICE
Basic Information
- Publication number:
- EP3950744
- PCT Application Number:
- JP2020010050
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP207845264
- PCT Publication Number:
- WO2020203073
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- PHOTOSENSITIVE COMPOSITION FOR EUV LIGHT, METHOD FOR PATTERN FORMATION, AND METHOD FOR PRODUCING ELECTRONIC DEVICE
- French Title of Invention:
- COMPOSITION PHOTOSENSIBLE POUR LUMIÈRE EUV, PROCÉDÉ DE FORMATION DE MOTIF ET PROCÉDÉ DE PRODUCTION D'UN DISPOSITIF ÉLECTRONIQUE
- German Title of Invention:
- LICHTEMPFINDLICHE ZUSAMMENSETZUNG FÜR EUV-LICHT, VERFAHREN ZUR MUSTERBILDUNG UND VERFAHREN ZUR HERSTELLUNG EINER ELEKTRONISCHEN VORRICHTUNG
- SPC Number:
Dates
- Filing date:
- 09/03/2020
- Grant date:
- 18/10/2023
- EP Publication Date:
- 09/02/2022
- PCT Publication Date:
- 08/10/2020
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 18/10/2023
- EP B1 Publication Date:
- 18/10/2023
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 09/03/2024
- Expiration date:
- 09/03/2040
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 11/10/2023
- Name:
- FUJIFILM Corporation
- Address:
- 26-30, Nishiazabu 2-chome, Minato-ku, Tokyo 106-8620, Japan (JP)
Inventor
- Name:
- SAKITA, Kyohei
- Address:
- Japan (JP)
Priority
1
- Priority Number:
- 2019067401
- Priority Date:
- 29/03/2019
- Priority Country:
- Japan (JP)
2
- Priority Number:
- 2020030660
- Priority Date:
- 26/02/2020
- Priority Country:
- Japan (JP)
Classification
- IPC classification:
- C08F 220/16; C08F 220/22; G03F 7/039; G03F 7/20; C08F 220/18; C08F 220/24; C08F 220/28; G03F 7/004; C08L 33/12;
Publication
European Patent Bulletin
- Issue number:
- 202342
- Publication date:
- 18/10/2023
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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