Patent details

EP3997519 Title: REAL TIME REGISTRATION IN LITOGRAPHY SYSTEM

Basic Information

Publication number:
EP3997519
PCT Application Number:
EP2020068286
Type:
European Patent Granted for LU
Legal Status:
Unitary Effect Registered
Application number:
EP207362963
PCT Publication Number:
WO2021004826
First applicant's nationality:
Translation Language:
EPO Publication Language:
English
English Title of Invention:
REAL TIME REGISTRATION IN LITOGRAPHY SYSTEM
French Title of Invention:
ENREGISTREMENT EN TEMPS RÉEL DANS UN SYSTÈME DE LITOGRAPHIE
German Title of Invention:
ECHTZEITREGISTRIERUNG IN EINEM LITOGRAFISCHEN SYSTEM
SPC Number:

Unitary Effect

Unitary Effect Requested:
Yes
Unitary Effect Request Filing Date:
19/12/2023
Link to UPP Register:
European Patent Register
Unitary Effect Request Withdrawal Date:
Unitary Effect Status:
Unitary Effect Registered
Unitary Effect Acceptance Decision Date:
03/01/2024
Unitary Effect Rejection Decision Date:
Unitary Effect Date:
29/11/2023
Unitary Effect Registration Date:
03/01/2024
Unitary Effect Re-establishment of rights Filing Date:
Unitary Effect Re-establishment of rights EPO Decision :
Unitary Effect Re-establishment of rights EPO Decision Date:
Explanatory Text UE:
Safety Net Request Date:
Safety Net Decision Date:
Safety Net Decision Outcome:
SPC Number:

Dates

Filing date:
29/06/2020
Grant date:
29/11/2023
EP Publication Date:
18/05/2022
PCT Publication Date:
14/01/2021
Claims Translation Received Date:
Translations Received Date (B1 EP Publication):
Translations Received Date (B2 EP Publication):
Translations Received Date (B3 EP Publication):
Publication date:
29/11/2023
EP B1 Publication Date:
29/11/2023
EP B2 Publication Date:
EP B3 Publication Date:
Lapsed date:
Expiration date:
29/06/2040
Renunciation date:
Revocation date:
Annulment date:

Owner

From:
22/11/2023
 
 

Name:
VISITECH AS
Address:
P.O.Box 616, 3003 Drammen, Norway (NO)

Inventor

1

Name:
JØRGENSEN, Trond
Address:
Norway (NO)

2

Name:
TAFJORD, Øyvind
Address:
Norway (NO)

3

Name:
ALMEDAL, Roy
Address:
Norway (NO)

4

Name:
KIRKHORN, Endre
Address:
Norway (NO)

Priority

Priority Number:
20190876
Priority Date:
11/07/2019
Priority Country:
Norway (NO)

Classification

IPC classification:
G03F 7/20; G03F 9/00;

Publication

European Patent Bulletin

1

Issue number:
202348
Publication date:
29/11/2023
Description:
Grant (B1)

2

Issue number:
202404
Publication date:
24/01/2024
Description:
Unitary Effect Request Receipt

3

Issue number:
202404
Publication date:
24/01/2024
Description:
Unitary Effect Request Acceptance

Annual Fees

Annual Fee Due Date:
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Expected Payer:
Last Annual Fee Payment Date:
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Payer:
Filing date Document type Number of pages