Patent details
EP3997519
Title:
REAL TIME REGISTRATION IN LITOGRAPHY SYSTEM
Basic Information
- Publication number:
- EP3997519
- PCT Application Number:
- EP2020068286
- Type:
- European Patent Granted for LU
- Legal Status:
- Unitary Effect Registered
- Application number:
- EP207362963
- PCT Publication Number:
- WO2021004826
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- REAL TIME REGISTRATION IN LITOGRAPHY SYSTEM
- French Title of Invention:
- ENREGISTREMENT EN TEMPS RÉEL DANS UN SYSTÈME DE LITOGRAPHIE
- German Title of Invention:
- ECHTZEITREGISTRIERUNG IN EINEM LITOGRAFISCHEN SYSTEM
- SPC Number:
-
Unitary Effect
- Unitary Effect Requested:
- Yes
- Unitary Effect Request Filing Date:
- 19/12/2023
- Link to UPP Register:
-
European Patent Register
- Unitary Effect Request Withdrawal Date:
-
- Unitary Effect Status:
- Unitary Effect Registered
- Unitary Effect Acceptance Decision Date:
- 03/01/2024
- Unitary Effect Rejection Decision Date:
-
- Unitary Effect Date:
- 29/11/2023
- Unitary Effect Registration Date:
- 03/01/2024
- Unitary Effect Re-establishment of rights Filing Date:
-
- Unitary Effect Re-establishment of rights EPO Decision :
-
- Unitary Effect Re-establishment of rights EPO Decision Date:
-
- Explanatory Text UE:
-
- Safety Net Request Date:
- Safety Net Decision Date:
- Safety Net Decision Outcome:
- SPC Number:
-
Dates
- Filing date:
- 29/06/2020
- Grant date:
- 29/11/2023
- EP Publication Date:
- 18/05/2022
- PCT Publication Date:
- 14/01/2021
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 29/11/2023
- EP B1 Publication Date:
- 29/11/2023
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- Expiration date:
- 29/06/2040
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 22/11/2023
-
-
- Name:
- VISITECH AS
- Address:
- P.O.Box 616, 3003 Drammen, Norway (NO)
Inventor
1
- Name:
- JØRGENSEN, Trond
- Address:
- Norway (NO)
2
- Name:
- TAFJORD, Øyvind
- Address:
- Norway (NO)
3
- Name:
- ALMEDAL, Roy
- Address:
- Norway (NO)
4
- Name:
- KIRKHORN, Endre
- Address:
- Norway (NO)
Priority
- Priority Number:
- 20190876
- Priority Date:
- 11/07/2019
- Priority Country:
- Norway (NO)
Classification
- IPC classification:
-
G03F 7/20;
G03F 9/00;
Publication
European Patent Bulletin
1
- Issue number:
- 202348
- Publication date:
- 29/11/2023
- Description:
- Grant (B1)
2
- Issue number:
- 202404
- Publication date:
- 24/01/2024
- Description:
- Unitary Effect Request Receipt
3
- Issue number:
- 202404
- Publication date:
- 24/01/2024
- Description:
- Unitary Effect Request Acceptance
Annual Fees
- Annual Fee Due Date:
-
- Annual Fee Number:
-
- Expected Payer:
-
- Last Annual Fee Payment Date:
-
- Last Annual Fee Paid Number:
-
- Payer:
-
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