Patent details
EP4036647 Title: MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD
Basic Information
- Publication number:
- EP4036647
- PCT Application Number:
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP221501455
- PCT Publication Number:
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD
- French Title of Invention:
- APPAREIL DE MESURE, APPAREIL DE LITHOGRAPHIE ET PROCÉDÉ DE FABRICATION D'ARTICLE
- German Title of Invention:
- MESSGERÄT, LITHOGRAPHIEGERÄT UND VERFAHREN ZUR HERSTELLUNG EINES ARTIKELS
- SPC Number:
Dates
- Filing date:
- 04/01/2022
- Grant date:
- 08/11/2023
- EP Publication Date:
- 03/08/2022
- PCT Publication Date:
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 08/11/2023
- EP B1 Publication Date:
- 08/11/2023
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 04/01/2024
- Expiration date:
- 04/01/2042
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 01/11/2023
- Name:
- CANON KABUSHIKI KAISHA
- Address:
- 30-2 SHIMOMARUKO 3-CHOME, OHTA-KU Tokyo 146-8501, Japan (JP)
Inventor
- Name:
- YAMAGUCHI, Wataru
- Address:
- Japan (JP)
Priority
- Priority Number:
- 2021013597
- Priority Date:
- 29/01/2021
- Priority Country:
- Japan (JP)
Classification
Publication
European Patent Bulletin
- Issue number:
- 202345
- Publication date:
- 08/11/2023
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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