Patent details

Basic Information

Publication number:

EP1157408

PCT Application Number:

PCT/EP/00/00816

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP009050022

PCT Publication Number:

WO/00/05117

First applicant's nationality:

Translation Language:

EPO Publication Language:

German

English Title of Invention:

DEVICE AND METHOD FOR THERMALLY TREATING SUBSTRATES

French Title of Invention:

DISPOSITIF ET PROCEDE DE TRAITEMENT THERMIQUE DE SUBSTRATS

German Title of Invention:

VORRICHTUNG UND VERFAHREN ZUM THERMISCHEN BEHANDELN VON SUBSTRATEN

SPC Number:

Dates

Filing date:

02/02/2000

Grant date:

08/10/2003

EP Publication Date:

08/10/2003

PCT Publication Date:

31/08/2000

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

28/11/2001

EP B1 Publication Date:

08/10/2003

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

02/02/2004

Expiration date:

02/02/2020

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

02/02/2000

 

 

Name:

Steag HamaTech AG

Address:

Ferdinand-von-Steinbeis-Ring 10, 75447 Sternenfels, Germany (DE)

Inventor

1

Name:

WEIHING Robert

Address:

Germany (DE)

2

Name:

DIETZE Uwe

Address:

United States (US)

3

Name:

SZEKERESCH Jakob

Address:

Germany (DE)

4

Name:

DRESS Peter

Address:

Germany (DE)

Priority

Priority Number:

19907497

Priority Date:

22/02/1999

Priority Country:

Germany (DE)

Classification

Main IPC Class:

H01L 21/00;

Filing date	Document type	Number of pages