Patent details

EP1248499 Title: Method and apparatus for production of extreme ultraviolet radiation

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Basic Information

Publication number:
EP1248499
PCT Application Number:
Type:
European Patent Granted for LU
Legal Status:
Lapsed
Application number:
EP011257623
PCT Publication Number:
First applicant's nationality:
Translation Language:
EPO Publication Language:
German
English Title of Invention:
Method and apparatus for production of extreme ultraviolet radiation
French Title of Invention:
Procédé et dispositif pour produire du rayonnement extrême ultraviolet
German Title of Invention:
Verfahren und Vorrichtung zum Erzeugen von extrem ultravioletter Strahlung
SPC Number:

Dates

Filing date:
29/10/2001
Grant date:
26/05/2010
EP Publication Date:
26/05/2010
PCT Publication Date:
Claims Translation Received Date:
Translations Received Date (B1 EP Publication):
Translations Received Date (B2 EP Publication):
Translations Received Date (B3 EP Publication):
Publication date:
09/10/2002
EP B1 Publication Date:
26/05/2010
EP B2 Publication Date:
EP B3 Publication Date:
Lapsed date:
29/10/2010
Expiration date:
29/10/2021
Renunciation date:
Revocation date:
Annulment date:

Owner

From:
29/10/2001
 
 

Name:
FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Address:
HANSASTRASSE 27C, 80686 MÜNCHEN, Germany (DE)

Name:
Koninklijke Philips Electronics N.V.
Address:
Groenewoudseweg 1, 5621 BA Eindhoven, Netherlands (NL)

Name:
Philips Intellectual Property & Standards GmbH
Address:
Steindamm 94, 20099 Hamburg, Germany (DE)

Inventor

1

Name:
Bergmann Klaus, Dr.
Address:
Germany (DE)

2

Name:
Löken Michael
Address:
Germany (DE)

3

Name:
Neff Willi, Dr.
Address:
Belgium (BE)

4

Name:
Seiwert Stefan
Address:
Germany (DE)

5

Name:
Pankert Joseph, Dr.
Address:
Germany (DE)

6

Name:
Klein Jürgen, Dr.
Address:
Germany (DE)

Priority

1

Priority Number:
10117377
Priority Date:
06/04/2001
Priority Country:
Germany (DE)

2

Priority Number:
10139677
Priority Date:
11/08/2001
Priority Country:
Germany (DE)

Classification

Main IPC Class:
H05G 2/00;