Patent details

EP2603975 Title: MICROMECHANICAL RESONATOR ARRAY AND METHOD FOR MANUFACTURING THEREOF

Basic Information

Publication number:
EP2603975
PCT Application Number:
PCT/FI/2011/050711
Type:
European Patent Granted for LU
Legal Status:
Lapsed
Application number:
EP118161462
PCT Publication Number:
WO/2012/020173
First applicant's nationality:
Translation Language:
EPO Publication Language:
English
English Title of Invention:
MICROMECHANICAL RESONATOR ARRAY AND METHOD FOR MANUFACTURING THEREOF
French Title of Invention:
RÉSEAU DE RÉSONATEURS MICROMÉCANIQUES ET PROCÉDÉ DE FABRICATION ASSOCIÉ
German Title of Invention:
ARRAY AUS MIKROMECHANISCHEN RESONATOREN UND VERFAHREN ZU SEINER HERSTELLUNG
SPC Number:

Dates

Filing date:
11/08/2011
Grant date:
17/12/2014
EP Publication Date:
17/12/2014
PCT Publication Date:
16/02/2012
Claims Translation Received Date:
Translations Received Date (B1 EP Publication):
Translations Received Date (B2 EP Publication):
Translations Received Date (B3 EP Publication):
Publication date:
19/06/2013
EP B1 Publication Date:
17/12/2014
EP B2 Publication Date:
EP B3 Publication Date:
Lapsed date:
11/08/2015
Expiration date:
11/08/2031
Renunciation date:
Revocation date:
Annulment date:

Owner

From:
11/08/2011
 
 

Name:
Teknologian tutkimuskeskus VTT
Address:
Vuorimiehentie 3, 02150 Espoo, Finland (FI)

Inventor

1

Name:
JAAKKOLA Antti
Address:
Finland (FI)

2

Name:
PENSALA Tuomas
Address:
Finland (FI)

3

Name:
KIIHAMÄKI Jyrki
Address:
Finland (FI)

Priority

Priority Number:
20105849
Priority Date:
13/08/2010
Priority Country:
Finland (FI)

Classification

Main IPC Class:
H03H 3/007;

Annual Fees

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